Shows the assembly and individual components of a high vacuum turbopump.
Where are Turbopumps used?
Turbopumps are utilized in various industries and applications that demand high vacuum environments. These include analytical applications such as mass spectrometry and electron microscopy, illuminant industry for lamp production, optical and glass industry for heat protection and coatings, research facilities for elementary-particle physics and laser applications, as well as thin film deposition and semiconductor manufacturing and numerous others.
Introduction to vacuum techniques, detailing the operational ranges and mechanisms of various vacuum pumps including mechanical, turbo-molecular, cryo, sorption, and sputter ion pumps. It also covers vacuum chambers and the operation principles of different gauges such as Pirani, thermocouple, hot filament ion, and Penning cold cathode gauges.
Across various industries, vacuum purging is used to remove volatile substances/chemicals from the test item at low temperatures first before heating. Under vacuum, butane, propane, and other solvents convert into a gaseous form and evaporate, also known as “outgassing.” Vacuum purging works by lowering the atmospheric pressure in a vacuum oven chamber. Atmospheric pressure prevents “outgassing” from the surface area of the test specimen.
Published by Oerlikon Leybold Vacuum. Oerlikon Leybold Vacuum, a member of the globally active industrial Oerlikon Group of companies has developed into the world market leader in the area of vacuum technology.
