Shows the assembly and individual components of a high vacuum turbopump.
Where are Turbopumps used?
Turbopumps are utilized in various industries and applications that demand high vacuum environments. These include analytical applications such as mass spectrometry and electron microscopy, illuminant industry for lamp production, optical and glass industry for heat protection and coatings, research facilities for elementary-particle physics and laser applications, as well as thin film deposition and semiconductor manufacturing and numerous others.
Introduction to vacuum techniques, detailing the operational ranges and mechanisms of various vacuum pumps including mechanical, turbo-molecular, cryo, sorption, and sputter ion pumps. It also covers vacuum chambers and the operation principles of different gauges such as Pirani, thermocouple, hot filament ion, and Penning cold cathode gauges.
